Vacuum Transport Unit - メーカー・企業と業務用製品 | イプロスものづくり

Vacuum transport unit for multi-vacuum processes

Vacuum transport unit for multi-vacuum processes

Adoption of a hexagonal center chamber Vacuum transport unit for multi-vacuum processes 【Features】 ○ Incorporates a gate valve within the center chamber, achieving space-saving design ○ Main pump (turbo molecular pump) of the center chamber is mounted on the upper lid, ensuring high maintainability ○ Equipped with a uniquely developed vacuum transport robot ○ Each chamber is equipped with an independent vacuum exhaust system (However, the center chamber and the load lock chamber share a system) ○ Equipped with a set load lock chamber capable of accommodating 13 φ300 Si wafers ● For other functions and details, please download the catalog.